The Emerging Communications Technology Institute (ECTI) is an interdisciplinary open research facility based in the Faculty of Applied Science and Engineering at the University of Toronto. It provides global university-based leadership in micro- and nanofabrication and electromagnetics research through access to state-of-the-art facilities and contractual research services when required . ECTI plays a leadership role in the areas of nanotechnology and nanofabrication, photonic materials and devices, micro- and nano-electromechanical systems (M/NEMS), biotechnology, micro- and nano-electronic devices, integrated optics, photovoltaic devices, microfluidics, microwave-RF devices, micro-sensors.
ECTI’s facilities include:
- Electron Beam Nanolithography Facility in a Class 100 Cleanroom (130 m2 in the Wallberg Bldg.)
- Class 1,000/10,000 Prototyping Cleanroom (230 m2 in the Bahen Bldg.)
- Class 100/1,000/10,000 Microfabrication Cleanroom (400 m2 in the Pratt Bldg.)
- Electromagnetics Labs (including antenna, radio-frequency and microwave)
Key Tools include:
- Electron Beam Pattern Generator – capable of line widths of 7 nm on a field size of 560×560 microns; stitch-and-overlay errors of 20 nm
- Full suite of lithography, deposition and etching tools: aligners, oxidation/annealing furnace, evaporators, deposition systems, reactive ion etchers, and more
- Cleanrooms are equipped with fully exhausted wet benches that provide better than Class 10 working surfaces, plus microscopes, spinners, ovens
- EM equipment includes antenna chambers, PCB etching, probe station and network analyzers, and much more
- Plasma Enhanced Chemical Vapor Deposition (PECVD) System
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